摘要：针对顶面驱动可变电容式静电微电机的参数优化设计问题，建立了一般解析物理描述模型，并给出了优化问题的数学模型。在考虑电机结构尺寸和电机控制方法优化的同时，结合数值积分方法和遗传算法，提出一种简单高效的优化设计方法，并通过有限元分析对提出的方法进行了有效性验证，实现了静电微电机的快速优化设计。

关键词：可变电容；静电微电机；优化设计；有限元分析
Abstract: A new optimization method of motor torque was proposed in this paper, to solve the parameter optimization design of the top-drive variable capacitive electrostatic micromotor. According to physical model of the micromotor, the mathematical model for optimization problems was build. Based on genetic algorithms and the numerical integration calculation, a fast optimization method was proposed concerned with the parameter of the micromotor and its excitation schemes. The finite element analysis shows the proposed method is effective to optimal design of the electrostatic micromotor. This method can be also used in the optimization design of other types of salient pole electrostatic micromotor.

Key words: variable capacitance ； electrostatic micromotor ； optimization design；  finite element analysis