摘 要:分析了静电马达的工作原理及静电力在微领域中的优势;综述了静电马达的发展历程及国内外研究现状,并对其应用前景进行了评析和展望。 关键词:微马达;静电;可变电容;综述
Abstract: Analysed the principle of electrostatic motor and advantages of electrostatic force in microfields;summarized the development and research status at home and abroad,and pointed out the prospects for the application of electrostatic motor. Key Words: Micro-motor;Electrostatic;Variable capacitance;Review
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