摘  要：该文介绍了静电谐波微电机的基本工作原理。通过分析系统中存在的静电结构耦合关系，并进行离散化处理，建立了结构场和静电场的有限元耦合平衡方程。讨论了静电场和结构场之间存在的耦合条件和各场的边界条件。由结点映射推导出位移和力在两物理场交界面上传递的表达式。总结了静电-结构耦合问题的迭代求解框图和详细步骤。通过对系统的有限元仿真，得到了柔轮的径向位移分布及其随系统参数的变化规律。所得的结果为进一步研究微电机的性能提供了依据。
关键词：静电谐波；静电-结构耦合；耦合条件；边界条件；有限元

Abstract: The basic operating principle of electrostatic harmonic micromotor was presented.By virtue of analyzing the coupled relationship between the electrostatics and the structure,a set of equations for finite element method were obtained in residual form by discretization.The coupling conditions between the electrostatics and the structure and the boundary conditions for each field were discussed.Based on the node mapping,formulas were derived for transfer of displacement and force at the electrostatics/structure interface.Then,the iterative flowchart and procedure was summarized for the coupled electrostatic-structural problem.By performing the finite element simulation for the system,distribution of the radial displacement for the flexspline was obtained,in addition to its variation with respect to system parameters.Results supplied evidence for further research on properties of the micromotor.
Key Words: Electrostatic harmonic;Electrostatic-structural coupling;Coupling conditions;Boundary conditions;Finite element method