摘  要：用ANSYS有限元法对超声电机圆盘复合振子面内振动模态进行了有限元分析，在其它结构尺寸参数不变的情况下，分别分析了圆盘复合振子的厚度尺寸、内径尺寸及外径尺寸对其面内弯曲谐振频率的影响；分析了金属弹性体的材料参数对圆盘复合振子谐振频率的影响，并将计算结果以曲线表示，分析结果对圆盘复合振子的结构设计和进一步优化设计具有重要的实际意义。
关键词：超声电机；复合振子；面内模态；有限元；谐振频率

Abstract: The paper analyzed the modes of the in-plane vibration modes of an annular composite vibrator by using the Ansys finite element software,and calculated the influence of the vibrator’s structural parameters on the in-plane bending resonance frequency of the vibrator.It also measured the change of the vibrator’s resonance frequency when utilizing different elastic material.The results that are calculated using FEA software Ansys were demonstrated with curve.The finite element analysis results provide a base for the structural design and further optimization of annular vibrator,and have important practical significance.
Key Words: Ultrasonic motor;Composite vibrator;In-plane mode;Finite element;Resonant frequency