摘要：利用Ansys有限元软件建立斜槽式超声电机定子的有限元模型，对振动模态进行数值仿真，分析了斜槽参数对谐振频率的影响。研究结果表明，斜槽的深度对谐振频率的影响最大，斜槽的宽度对谐振频率的影响最小。

关键词：超声电机；斜槽；振动模态；谐振频率
Abstract: In this paper, a FEM model of ultrasonic motor stator with diagonal slits was established with finite element analysis software Ansys. The vibration modes of ultrasonic motor stator with diagonal slits were conducted by numerical simulation. The influence of different parameters on resonant frequency was analyzed. The research results show that the depth of diagonal slits has the greatest effect on resonant frequency, while the width influence is the least.

Key words: ultrasonic motor; diagonal slit; vibration mode; resonant frequency