摘  要：研制了一种新型的电磁驱动式无阀微泵，该微泵利用有机玻璃制作泵腔，采用扩散口/喷口的结构，以PDMS作为振动膜，利用扁平振动电机作为驱动部件。对微泵的振动频率和输出流量进行了测试，结果显示，电压在1.0 V~1.8 V范围内时，微泵的输出流量随着电压的升高而增加，当电压在1.8~3.3 V时，微泵输出的流量保持稳定，达到150 μL/min。具有良好的性能和低廉的成本。
关键词：扁平振动电机；无阀微泵；PDMS振动膜；扩散口/喷口

Abstract: A novel electro-magnetically actuated valveless micropump was presented.The PMMA is used to fabricate the cavity,and the structure of diffuser and nozzle is adopted in the micropump.The flat vibration motor is used as the actuator,and the flexible polydimethylsiloxane(PDMS)is used as the vibration membrane.The vibration frequency and the flow rate of the micropump are measured,and the result shows that the voltage have significant influence to them.When the voltage ranges between 1.0 V and 1.8 V,the flow rate has significant increase;but when the voltage changes from 1.8 V to 3.3 V，the flow rate has small change.The maximum flow rate is 150 μL/min.The valveless micropump has simple structure,low driving voltage,low cost and good performance.
Key words: flat vibration motor; valveless micropump; PDMS membrane; diffuser/nozzle