摘  要：以基于薄板内振动的纵弯模式驻波型超声波直线电机为研究对象，选择矩形薄板压电陶瓷片定子及单足驱动形式为例，分析了驱动机理，设计电机的具体结构，制作了样机并进行了实验测试，结果表明，电机运行良好，正反向运动灵活。
关键词：直线型超声波电机；面内振动；矩形薄板；纵弯模式

Abstract: In this paper,researced the longitudinal flexural mode standing wavetype ultrasonic linear motor based on the vibration of plate.Selected the rectangular plate piezoelectric ceramics and singlefoot drive stator forms as an example,analysed the drive mechanism and desiged the specific structure of motor.Then Produced a sample USM and conducted experiments to test.The results show that the motor runs well,the forward and reverse movement are flexible.
Key Words: Linear ultrasonic motor (LUM);Vibration in plane;Thin rectangular plate;Longitudinal-flexural mode