摘要：本文提出了应用于半导体封装设备固晶机焊头的音圈电机建模与设计方法。音圈电机输出力与电场、磁场和机械结构成非线性关系。通常情况下，基于几何结构和所使用材料的导出磁密分布的建模技术是相当复杂的，特别是当磁轭材料存在孔洞时。所以本文基于机械结构和使用材料，提出通过使用电磁仿真软件COMSOL Multiphysics而发展的一种特殊的设计音圈电机的建模过程。一种迭代优化设计过程旨在使音圈电机在一定的容积下最大化其输出推力。仿真结果分析表明所提出音圈电机的设计方法是有效的，能为音圈电机的研制与测试提供良好的理论基础。

关键词：音圈电机;建模;电磁仿真;优化
Abstract: This paper presented a modeling and design method of a voice coil motor applied in a die bonder used in integrated circuit (IC) packaging device. The output force of voice coil motor is a nonlinear function of its constant associated electromagnetic field and mechanical structure. Normally, the modeling technology based on the geometric structure and the use of material derived flux density distribution is very complex，especially when there exist holes in . Based on the mechanical structure and used material, the paper proposed a special kind of modeling process to design the voice coil motor using the electromagnetic simulation software COMSOL Multiphysics. An iterative optimization design process aims to maximize the output force of the voice coil motor in a certain volume. The results of simulation analysis shows that this voice coil motor design method is effective and can provide theoretical basis of the voice coil motor development and test.

Key words: voice coil motor; modeling; electromagnetic simulation; optimization