摘  要：设计了应用于半导体封装设备金丝球邦定机的高速高精度直线电机X-Y平台控制器，以达到高速、高精度响应，以及在外界干扰和参数不确定性因素影响下的鲁棒性。通过对PI控制器、PDF控制器和PDFF控制器的性能比较，选择PDFF作为速度环控制器、PID作为位置环控制器的双环控制架构。根据降阶的系统模型、利用基本CRS算法对控制器参数进行优化。仿真和实验结果证明，该控制方案具有良好的响应性能和鲁棒性，加速度可以达到5 g，调整时间为4ms以内。
关键词：直线电机；参数辨识；PDFF控制器；CRS算法；实验

Abstract:In this paper,design and implementation of a CRS-based high precision motion controller was presented for a high speed linear motor driven XY table in the semiconductor wire bonding application.The aims of this work included high speed and high precision response of the system and its robustness for the external disturbance and the parameters uncertainty.We chosed the PDFF controller for the speed loop after the comparison of PI,PDF,PDFF controllers,and the PID controller for the position loop.The optimization of the controller parameters with the CRS algorithm based on the reduced-order modeling is presented.The good performance and robustness with the acceleration 5 g and the setting time within 4 ms profile had been shown in the results of the simulation and the experiments.
Key Words:Linear motor；System identification；PDFF controller；CRS algorithm；Experiment