摘  要：提出并设计了以音圈电机作为直接驱动的应用于半导体封装设备LED全自动固晶机摆臂系统Z轴的实现方案，以达到高速、高精度响应及节约成本。通过对固晶机摆臂系统Z轴动力学建模求得电机所需推力，以电磁场计算为基础，基于Ansoft建立音圈电机有限元模型，计算出磁感应强度的矢量分布，根据计算结果设计样机，并选择PI作为速度环控制器，PID作为位置环控制器的双环控制架构对样机进行实验研究。仿真和实验结果证明了设计方案的有效性。
关键词：LED全自动固晶机；音圈电机；电磁场；有限元；实验

Abstract: In this paper, the direct driving implementation scheme using voice coil actuator was proposed and designed in the Z-axis of bond arm system of semiconductor die bonding application. The aim of this work included high speed and high precision of response of the system and cost saving. The thrust of voice coil actuator was calculated through the dynamic modeling of the Z-axis of bond arm system of die bonder. The finite element method was used to simulate the actuator and calculate the distribution of the density of magnetic field based on the calculation of the electromagnetic field. The prototype was designed and the PI controller for the speed loop and PID controller for position loop were chose for the experiments research. The simulation and the experiment result confirmed the availability of the design scheme.
Key words: LED automatic die bonder; voice coil actuator; electromagnetic field; finite element; experiment