摘要：永磁直线同步电动机法向磁场力波动是引起精密机床直线进给系统振动的主要原因，为分析不同极、槽数配合对永磁直线电机法向振动的影响，采用有限元法计算了不同极、槽数配合的永磁直线同步电动机法向磁应力低阶谐波次数、直线电机动子的固有频率和振动模态，以及不同极、槽数配合的直线电机法向磁场力的激振频率。分析结果表明：永磁直线同步电动机的极、槽数相差越小则动子的主振型阶次越低，越易引起共振。精密机床进给系统永磁直线同步电机的选择应综合考虑极、槽数配合对推力波动的削弱和对法向振动的影响。

关键词：高精数控机床；永磁直线同步电机；法向力；振动
Abstract: The root cause of vibration of linear feed system of highprecision CNC machine tool is the permanent magnet linear synchronous motor (PMLSM) normal magnetic forces ripples. In order to analyze normal vibration of PMLSM with different poles/slots number, the order of harmonic and the spacetime distribution of normal force had been calculated with finite element method (FEM), as well as the natural frequency and vibration modal of mover .The normal force frequency of different velocity were also analyzed. The results indicate that when the numbers of pole and slot differ little, the resonance is liable to produce. Permanent magnet linear synchronous motor selection should be taken into account pole and slot numbers in thrust fluctuation and the effect of normal vibration.

Key words: highprecision CNC machine tool; permanent magnet linear synchronous motor; normal force; vibration