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标题：尺蠖压电驱动器的设计及迟滞补偿控制方法 |
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作者：马立，曾佑轩，蒋晨阳，等 |
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| 2017年第12期 访问次数：308次 |
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摘要：设计了一种基于柔性放大原理的尺蠖压电驱动器，驱动器动子钳位部分采用对称式杠杆放大结构，中间驱动部分采用复合桥式结构。根据尺蠖压电驱动器迟滞非线性特点，在模型分析基础上，建立Preisach模型，确定逆Preisach迟滞模型的开环控制方法，并采用前馈PID方法实现闭环控制。搭建了尺蠖压电驱动器的开环实验系统，实验结果显示：尺蠖压电驱动器在开环控制下位移跟踪最大误差为29 μm；当跟踪位移为80 μm连续运动20个步距时，正反向行程的平均误差为21 μm；当驱动电压为5 V时，获得最小步距15 μm。同时，搭建了尺蠖压电驱动器的闭环实验系统，在该系统上进行前馈PID控制实验，闭环控制条件下，系统位移跟踪的最大误差为1.4 μm，驱动器的定位精度得到提高。
关键词：尺蠖；压电驱动器；迟滞非线性；Preisach模型；PID控制
Abstract: A piezoelectric inchworm actuator based on the principle of flexible amplification was developed. In the moving mechanism of the actuator, symmetrical lever amplification structure was adopted in the clamping mechanism. The compound bridge structure was used in the middle drive mechanism. According to hysteresis compensation control methods, Preisach model was built on the basis of the model analysis, inverse Preisach model was determined to be applied to the openloop control method. And the feed forward PID control method was carried on to improve the property of the actuator further. Openloop control experiment system of the piezoelectric inchworm actuators was established.The results show that the maximum displacement deviation is 29 μm; The average is 21 μm when the tracking displacement is 80 μm and the number of the pitches is 20 in the test of forward and reverse itinerary continuous movement.The smallest step displacement of signal stroke is 15 μm when the voltage is 5 V. Closedloop control experiment system of the piezoelectric inchworm actuators was established to carry out the feed forward PID control experiment. The maximum deviation displacement of the system during the tracking is 14 μm, the positioning accuracy of the actuator is improved.
Key words: inchworm; piezoelectric actuators; hysteresis; Preisach model; PID control |
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