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标题：大行程平动与大角度旋转平面电机设计 |
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作者：陈亚英，张杰，张鸣 |
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| 2017年第6期 访问次数：266次 |
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摘要：在集成电路制造领域，为实现对硅片的加工和检测，运动台需要承载硅片进行三自由度大行程运动，包括沿x、y 轴的大行程平动和绕z轴的大角度旋转。针对上述运动需求，本文以圆形线圈无铁心永磁平面电机为研究对象，利用圆形线圈的旋转不变性，采用洛伦兹法则对其进行电磁建模，得出满足平面电机运动控制需求的实时解析模型。然后，利用基于MoorePenrose 伪逆法的电磁力和力矩解耦策略，以电机连续最大功耗最小为评价指标，对平面电机参数进行优化设计。依据设计结果，加工制作了实验样机，并基于样机平台对本文提出的实时电磁模型进行了验证，模型计算结果与实验结果一致；电机进行电磁力和力矩解耦时，最大出力误差小于6%。最后，利用样机实现了100 mm×100 mm的面内大行程平动和绕z轴360°转动，验证了电磁模型与电机结构的有效性。
关键词：大行程平动与大角度旋转；圆形线圈；磁钢模块；线圈模块；实时电磁模型
Abstract: Besides longstroke movements along different axes, full rotation around the zaxis is also needed in many applications, especially in semiconductor device fabrication. This paper focused on the design of the planar motor with circular coils for such motion requirement. A realtime model was proposed to predict the force and torque exerted on the magnet array according to the rotation invariance of the circular coil firstly. Then the main dimensions of the planar motor were optimized for minimizing the ohmic loss with the decoupling strategy based on the MoorePenrose inverse. According to the optimization result, a prototype stage was manufactured, and several relational experiments were also achieved. The measurement data of the force and the torque was agreed with the proposed model. The error of the decoupling strategy of the force and torque is less than 6%. Finally, a planar motion about 100 mm × 100 mm and 360° rotation around the zaxis was archived.
Key words: longstroke motion and full rotation, circular coil, magnet module, coil module, realtime model |
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