摘要：为实现垂直轴方向的大行程精密定位，以超声波直线电机为驱动元件，构建了具有毫米级行程的垂直轴定位系统。介绍了超声波直线电机的工作原理和垂直轴定位机构的组成及特点。由于难以获得超声波直线电机的精确数学模型，提出了超声波直线电机的CMAC与PID复合控制策略。实验表明，使用复合控制可以使系统获得更快的响应速度，同时具有较小的超调量；采用不同步长的连续步进实验测试了系统的定位精度和定位准确度。

关键词：超声波直线电机；垂直轴；CMAC；精密定位
Abstract: To achieve precision positioning of the vertical axis direction with large stroke, a vertical axis positioning system was build which having millimeter stroke based on ultrasonic linear motor. The working principle of ultrasonic linear motor was introduced, the composition and characteristics of the vertical axis positioning mechanism were also described. Since it was difficult to obtain precise mathematical model of the ultrasonic linear motor, the CMAC and PID compound control strategy was proposed. The compound control strategy could enhance the system’s response and reduce overshoot, which were proved by experiment. Positioning precision and positioning accuracy were tested by the continuous stepping experiment with different step.

Key words: ultrasonic linear motor；vertical axis；CMAC；precision positioning